Krishna Ramadurai

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for protecting an EUV light source chamber from...
- Patent number 8,969,838
- Issue date Mar 3, 2015
- ASML Netherlands B.V.
- Georgiy O. Vaschenko
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Systems and methods for protecting an EUV light source chamber from...
- Publication number 20100258747
- Publication date Oct 14, 2010
- Cymer, Inc.
- Georgiy O. Vaschenko
- G05 - CONTROLLING REGULATING