Krishna Shrinivasan

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Single-chamber sequential curing of semiconductor wafers
- Patent number 8,137,465
- Issue date Mar 20, 2012
- Novellus Systems, Inc.
- Krishna Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...