Krishnan Shrinivasan

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Bangalore, IN

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Patents Grantslast 30 patents

Information Patent Grant
Systems for uniform heat transfer including adaptive portions
- Patent number 9,835,388
- Issue date Dec 5, 2017
- Novellus Systems, Inc.
- Keerthi Gowdaru
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Single-chamber sequential curing of semiconductor wafers
- Patent number 8,951,348
- Issue date Feb 10, 2015
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,629,068
- Issue date Jan 14, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20140080324
- Publication date Mar 20, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTIVE HEAT TRANSFER METHODS AND SYSTEMS FOR UNIFORM HEAT TRANSFER
- Publication number 20130175005
- Publication date Jul 11, 2013
- Keerthi Gowdaru
- F28 - HEAT EXCHANGE IN GENERAL