Krishnan Shrinivasan

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 9,873,946
- Issue date Jan 23, 2018
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,980,769
- Issue date Mar 17, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing stress in porous dielectric films
- Patent number 8,889,233
- Issue date Nov 18, 2014
- Novellus Systems, Inc.
- Maxim Kelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,454,750
- Issue date Jun 4, 2013
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal heat transfer and temperature control
- Patent number 7,941,039
- Issue date May 10, 2011
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for processing semiconductor substrates using...
- Patent number 7,503,334
- Issue date Mar 17, 2009
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- B08 - CLEANING
Information Patent Grant
Cast pedestal with heating element and coaxial heat exchanger
- Patent number 7,327,948
- Issue date Feb 5, 2008
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sealing substrate load port in a high pres...
- Patent number 7,105,061
- Issue date Sep 12, 2006
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for using surfactants in supercritical fluid p...
- Patent number 6,905,556
- Issue date Jun 14, 2005
- Novellus Systems, Inc.
- Raashina Humayun
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for removing photoresist and post-etch residue...
- Patent number 6,848,455
- Issue date Feb 1, 2005
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Apparatus and methods for processing semiconductor substrates using...
- Patent number 6,848,458
- Issue date Feb 1, 2005
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- B08 - CLEANING
Information Patent Grant
Method for removing photoresist and post-etch residue using activat...
- Patent number 6,800,142
- Issue date Oct 5, 2004
- Novellus Systems, Inc.
- Adrianne Kay Tipton
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Supercritical solutions for cleaning photoresist and post-etch resi...
- Patent number 6,764,552
- Issue date Jul 20, 2004
- Novellus Systems, Inc.
- Patrick C. Joyce
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Measurement of substrate temperature in a process chamber using non...
- Patent number 6,563,092
- Issue date May 13, 2003
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for maintaining wafer back side and edge exclusion during...
- Patent number 6,550,484
- Issue date Apr 22, 2003
- Novellus Systems, Inc.
- Sanjay Gopinath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,333,268
- Issue date Dec 25, 2001
- Novellus Systems, Inc.
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,228,563
- Issue date May 8, 2001
- GaSonics International Corporation
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20150114292
- Publication date Apr 30, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and methods for increasing the rate of solute concentrati...
- Publication number 20080264443
- Publication date Oct 30, 2008
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- B08 - CLEANING

Krishnan Shrinivasan

Person

Patents Grantslast 30 patents

Multi-station sequential curing of dielectric films

Multi-station sequential curing of dielectric films

Method for reducing stress in porous dielectric films

Multi-station sequential curing of dielectric films

Pedestal heat transfer and temperature control

Apparatus and methods for processing semiconductor substrates using...

Cast pedestal with heating element and coaxial heat exchanger

Method and apparatus for sealing substrate load port in a high pres...

Method and apparatus for using surfactants in supercritical fluid p...

Method and apparatus for removing photoresist and post-etch residue...

Apparatus and methods for processing semiconductor substrates using...

Method for removing photoresist and post-etch residue using activat...

Supercritical solutions for cleaning photoresist and post-etch resi...

Measurement of substrate temperature in a process chamber using non...

Apparatus for maintaining wafer back side and edge exclusion during...

Method and apparatus for removing post-etch residues and other adhe...

Method and apparatus for removing post-etch residues and other adhe...

Patents Applicationslast 30 patents

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

Apparatus and methods for increasing the rate of solute concentrati...