Kristen Rounds

Follow

Person

Rowley, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Controlling an ion beam in a wide beam current operation range
- Patent number 9,679,745
- Issue date Jun 13, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method to control ion beam current
- Patent number 9,396,903
- Issue date Jul 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLING AN ION BEAM IN A WIDE BEAM CURRENT OPERATION RANGE
- Publication number 20170110286
- Publication date Apr 20, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD TO CONTROL ION BEAM CURRENT
- Publication number 20160233048
- Publication date Aug 11, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS