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Kristen Scheer
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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for forming an oxynitride layer by performing oxi...
Patent number
7,517,814
Issue date
Apr 14, 2009
Tokyo Electron, Ltd.
Cory S. Wajda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for forming an oxynitride layer
Patent number
7,501,352
Issue date
Mar 10, 2009
Tokyo Electron, Ltd.
Masanobu Igeta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Formation of ultra-thin oxide layers by self-limiting interfacial o...
Patent number
7,235,440
Issue date
Jun 26, 2007
Tokyo Electron Limited
David L O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming uniform ultra-thin oxynitride layers
Patent number
7,202,186
Issue date
Apr 10, 2007
Tokyo Electron Limited
David L O'Meara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Forming gate oxides having multiple thicknesses
Patent number
7,160,771
Issue date
Jan 9, 2007
International Business Machines Corporation
Anthony I-Chih Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interfacial oxidation process for high-k gate dielectric process in...
Patent number
6,974,779
Issue date
Dec 13, 2005
Tokyo Electron Limited
David L O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a uniform distribution of nitrogen in silicon ox...
Patent number
6,930,060
Issue date
Aug 16, 2005
International Business Machines Corporation
Anthony I. Chou
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and system for forming an oxynitride layer by performing oxi...
Publication number
20060228871
Publication date
Oct 12, 2006
Cory S. Wajda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and system for forming an oxynitride layer
Publication number
20060228902
Publication date
Oct 12, 2006
Masanobu Igeta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Forming gate oxides having multiple thicknesses
Publication number
20050118764
Publication date
Jun 2, 2005
Anthony I-Chih Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interfacial oxidation process for high-k gate dielectric process in...
Publication number
20050059259
Publication date
Mar 17, 2005
TOKYO ELECTRON LIMITED
David L. O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of ultra-thin oxide layers by self-limiting interfacial o...
Publication number
20050026453
Publication date
Feb 3, 2005
TOKYO ELECTRON LIMITED
David L. O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming uniform ultra-thin oxynitride layers
Publication number
20050026459
Publication date
Feb 3, 2005
TOKYO ELECTRON LIMITED
David L. O'Meara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING A UNIFORM DISTRIBUTION OF NITROGEN IN SILICON OX...
Publication number
20040256664
Publication date
Dec 23, 2004
International Business Machines Corporation
Anthony I. Chou
H01 - BASIC ELECTRIC ELEMENTS