Ku-Hsiang SUNG

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Taoyuan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for cleaning substrates
- Patent number 12,032,302
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Hsuan Liu
- B08 - CLEANING
Information Patent Grant
Ozone wafer cleaning module having an ultraviolet lamp module with...
- Patent number 11,430,671
- Issue date Aug 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yang Lin
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR CLEANING SUBSTRATES
- Publication number 20240310744
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsuan LIU
- B08 - CLEANING
Information Patent Application
METHOD AND DEVICE FOR CLEANING SUBSTRATES
- Publication number 20220308464
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsuan LIU
- B08 - CLEANING
Information Patent Application
OZONE WAFER CLEANING MODULE HAVING AN ULTRAVIOLET LAMP MODULE WITH...
- Publication number 20220037171
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS