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Kuang-Han Ke
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Shield or ring surrounding semiconductor workpiece in plasma chamber
Patent number
6,689,249
Issue date
Feb 10, 2004
Applied Materials, Inc.
Kuang-Han Ke
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Shield or ring surrounding semiconductor workpiece in plasma chamber
Patent number
6,284,093
Issue date
Sep 4, 2001
Applied Materials, Inc.
Kuang-Han Ke
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Magnetically-enhanced plasma chamber with non-uniform magnetic field
Patent number
6,113,731
Issue date
Sep 5, 2000
Applied Materials, Inc.
Hongching Shan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diagnostic pedestal assembly for a semiconductor wafer processing s...
Patent number
5,989,349
Issue date
Nov 23, 1999
Applied Materials, Inc.
Kuang-Han Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for improving wafer and chuck edge protection
Patent number
5,740,009
Issue date
Apr 14, 1998
Applied Materials, Inc.
Bryan Pu
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
Shield or ring surrounding semiconductor workpiece in plasma chamber
Publication number
20020066531
Publication date
Jun 6, 2002
APPLIED MATERIALS, INC.
Kuang-Han Ke
H01 - BASIC ELECTRIC ELEMENTS