Kuei-Chang Ho

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Hsin-chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for evacuating a process chamber
- Patent number 6,174,376
- Issue date Jan 16, 2001
- Taiwan Semiconductor Manufacturing Co., Ltd
- Heng-Yi Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...