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Patents Grants
last 30 patents
Information
Patent Grant
Supporting an optical element
Patent number
11,314,177
Issue date
Apr 26, 2022
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Projection exposure apparatus for semiconductor lithography
Patent number
11,281,114
Issue date
Mar 22, 2022
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging arrangement with actively adjustable metrology supp...
Patent number
10,890,850
Issue date
Jan 12, 2021
Carl Zeiss SMT GmbH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical system for microlithography
Patent number
10,754,132
Issue date
Aug 25, 2020
Carl Zeiss SMT GmbH
Olaf Rogalsky
G02 - OPTICS
Information
Patent Grant
Projection exposure apparatus, and method for reducing deformations...
Patent number
10,599,051
Issue date
Mar 24, 2020
Carl Zeiss SMT GmbH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging arrangement with a piezoelectric device
Patent number
10,416,570
Issue date
Sep 17, 2019
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
Patent number
10,345,710
Issue date
Jul 9, 2019
Carl Zeiss SMT GmbH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element module with minimized parasitic loads
Patent number
10,215,948
Issue date
Feb 26, 2019
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element unit for exposure processes
Patent number
10,203,607
Issue date
Feb 12, 2019
Carl Zeiss SMT GmbH
Tilman Schwertner
G02 - OPTICS
Information
Patent Grant
Optical module for a microlithography objective holding optical ele...
Patent number
10,197,925
Issue date
Feb 5, 2019
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Positioning unit and apparatus for adjustment of an optical element
Patent number
10,133,021
Issue date
Nov 20, 2018
Carl Zeiss SMT GmbH
Ulrich Weber
G02 - OPTICS
Information
Patent Grant
Optical module for a microlithography objective holding optical ele...
Patent number
9,977,228
Issue date
May 22, 2018
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV imaging apparatus
Patent number
9,904,175
Issue date
Feb 27, 2018
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical projection system
Patent number
9,891,535
Issue date
Feb 13, 2018
Carl Zeiss SMT GmbH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging device and method for reducing dynamic fluctuations...
Patent number
9,817,322
Issue date
Nov 14, 2017
Carl Zeiss SMT GmbH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging device with thermal attenuation
Patent number
9,810,996
Issue date
Nov 7, 2017
Carl Zeiss SMT GmbH
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging arrangement with simplified manufacture
Patent number
9,804,500
Issue date
Oct 31, 2017
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support elements for an optical element
Patent number
9,709,895
Issue date
Jul 18, 2017
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning unit and apparatus for adjustment of an optical element
Patent number
9,664,873
Issue date
May 30, 2017
Carl Zeiss SMT GmbH
Ulrich Weber
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical projection system
Patent number
9,557,653
Issue date
Jan 31, 2017
Carl Zeiss SMT GmbH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and measuring device for a projection lens
Patent number
9,436,095
Issue date
Sep 6, 2016
Carl Zeiss SMT GmbH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical arrangement in a microlithographic projection exposure appa...
Patent number
9,250,417
Issue date
Feb 2, 2016
Carl Zeiss SMT GmbH
Dirk Schaffer
G02 - OPTICS
Information
Patent Grant
Optical module with a measuring device
Patent number
9,175,948
Issue date
Nov 3, 2015
Carl Zeiss SMT GmbH
Armin Schoeppach
G01 - MEASURING TESTING
Information
Patent Grant
Optical projection system
Patent number
9,104,016
Issue date
Aug 11, 2015
Carl Zeiss SMT GmbH
Johannes Rau
G02 - OPTICS
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
9,081,296
Issue date
Jul 14, 2015
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Positioning unit and apparatus for adjustment of an optical element
Patent number
9,075,174
Issue date
Jul 7, 2015
Carl Zeiss SMT GmbH
Ulrich Weber
G02 - OPTICS
Information
Patent Grant
Optical element unit for exposure processes having sealing element
Patent number
9,046,795
Issue date
Jun 2, 2015
Carl Zeiss SMT GmbH
Tilman Schwertner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support elements for an optical element
Patent number
8,988,654
Issue date
Mar 24, 2015
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
8,902,519
Issue date
Dec 2, 2014
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Optical imaging device with thermal attenuation
Patent number
8,902,401
Issue date
Dec 2, 2014
Carl Zeiss SMT GmbH
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL ELEMENT, PROJECTION OPTICAL UNIT AND PROJECTION EXPOSURE AP...
Publication number
20240176249
Publication date
May 30, 2024
Carl Zeiss SMT GMBH
Marwene Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND PROJECTION EXPOSURE APPARATUS
Publication number
20230408934
Publication date
Dec 21, 2023
Carl Zeiss SMT GMBH
Marwene Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT, AND METHOD FOR MANUFACTURING...
Publication number
20230185080
Publication date
Jun 15, 2023
Carl Zeiss SMT GMBH
Marwene Nefzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DAMPING ARRANGEMENT FOR VIBRATION DAMPING OF AN ELEMENT IN AN OPTIC...
Publication number
20230104921
Publication date
Apr 6, 2023
Carl Zeiss SMT GMBH
Marwene Nefzi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...
Publication number
20230072843
Publication date
Mar 9, 2023
Carl Zeiss SMT GMBH
Dirk Heinrich Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT OF AN OPTICAL UNIT
Publication number
20220283509
Publication date
Sep 8, 2022
Carl Zeiss SMT GMBH
Boaz Pnini
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORTING AN OPTICAL ELEMENT
Publication number
20210181644
Publication date
Jun 17, 2021
Carl Zeiss SMT GMBH
Jens Kugler
G01 - MEASURING TESTING
Information
Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20210080841
Publication date
Mar 18, 2021
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS, AND METHOD FOR REDUCING DEFORMATIONS...
Publication number
20190219926
Publication date
Jul 18, 2019
Carl Zeiss SMT GMBH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE
Publication number
20190094705
Publication date
Mar 28, 2019
Carl Zeiss SMT GMBH
Jens Kugler
G02 - OPTICS
Information
Patent Application
OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL ELE...
Publication number
20180373007
Publication date
Dec 27, 2018
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING ARRANGEMENT WITH ACTIVELY ADJUSTABLE METROLOGY SUPP...
Publication number
20180275527
Publication date
Sep 27, 2018
Carl Zeiss SMT GMBH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical Projection System
Publication number
20180259856
Publication date
Sep 13, 2018
Carl Zeiss SMT GMBH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
Publication number
20180181007
Publication date
Jun 28, 2018
Carl Zeiss SMT GMBH
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
Publication number
20180024438
Publication date
Jan 25, 2018
Carl Zeiss SMT GMBH
Jens Kugler
G02 - OPTICS
Information
Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
Publication number
20170351047
Publication date
Dec 7, 2017
Carl Zeiss SMT GMBH
Ulrich Weber
G02 - OPTICS
Information
Patent Application
Optical Projection System
Publication number
20170219929
Publication date
Aug 3, 2017
Carl Zeiss SMT GMBH
Johannes Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
Publication number
20170082930
Publication date
Mar 23, 2017
Carl Zeiss SMT GMBH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING ARRANGEMENT WITH SIMPLIFIED MANUFACTURE
Publication number
20160179013
Publication date
Jun 23, 2016
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Application
OPTICAL IMAGING DEVICE
Publication number
20160147159
Publication date
May 26, 2016
Carl Zeiss SMT GMBH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV IMAGING APPARATUS
Publication number
20160077441
Publication date
Mar 17, 2016
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
Publication number
20160041360
Publication date
Feb 11, 2016
Carl Zeiss SMT GMBH
Ulrich Weber
G02 - OPTICS
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20160041475
Publication date
Feb 11, 2016
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL PROJECTION SYSTEM
Publication number
20150323873
Publication date
Nov 12, 2015
Carl Zeiss SMT GMBH
Johannes Rau
G02 - OPTICS
Information
Patent Application
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
Publication number
20150316853
Publication date
Nov 5, 2015
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
Publication number
20150168846
Publication date
Jun 18, 2015
Carl Zeiss SMT GMBH
Tilman Schwertner
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AN...
Publication number
20150168853
Publication date
Jun 18, 2015
Carl Zeiss SMT GMBH
Mathias Schumacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Holding Device for an Optical Element in an Objective
Publication number
20150138520
Publication date
May 21, 2015
ASML NETHERLANDS B.V.
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
Publication number
20150109591
Publication date
Apr 23, 2015
Carl Zeiss SMT GMBH
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20150070789
Publication date
Mar 12, 2015
Carl Zeiss SMT GMBH
Jens Kugler
G02 - OPTICS