Kui Zhao

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Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor having a variable coupling of low frequency RF power...
- Patent number 12,062,524
- Issue date Aug 13, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor having a function of tuning low frequency RF power d...
- Patent number 11,830,747
- Issue date Nov 28, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor and heating apparatus therefor
- Patent number 11,363,680
- Issue date Jun 14, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable matching network and an inductively coupled plasma proce...
- Patent number 10,685,811
- Issue date Jun 16, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
Plasma Reactor and Heating Apparatus Therefor
- Publication number 20200214087
- Publication date Jul 2, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control Apparatus for Semiconductor Processing Equipmen...
- Publication number 20200211873
- Publication date Jul 2, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCE...
- Publication number 20200090908
- Publication date Mar 19, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLASMA REACTOR HAVING A FUNCTION OF TUNING LOW FREQUENCY RF POWER D...
- Publication number 20190206703
- Publication date Jul 4, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Kui ZHAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA REACTOR HAVING A FUNCTION OF TUNING LOW FREQUENCY RF POWER D...
- Publication number 20190006155
- Publication date Jan 3, 2019
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS