Kuihyun YOON

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Etching apparatus
- Patent number 11,515,193
- Issue date Nov 29, 2022
- Samsung Electronics Co., Ltd.
- Kuihyun Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grip apparatus and substrate inspection system including the same,...
- Patent number 10,532,896
- Issue date Jan 14, 2020
- Samsung Electronics Co., Ltd.
- Kuihyun Yoon
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection system
- Patent number 10,006,872
- Issue date Jun 26, 2018
- Samsung Electronics Co., Ltd.
- Wonguk Seo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
COOLANT TUBE BLOCK ASSEMBLY AND SEMICONDUCTOR PROCESSING DEVICE INC...
- Publication number 20240379334
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Woojin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20240212992
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Changheon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLU...
- Publication number 20240162017
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317418
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Jungmin KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230143049
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND...
- Publication number 20230143327
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- DONGSEOK HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
- Publication number 20230060400
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONFINEMENT RING, SEMICONDUCTOR MANUFACTURING APPARATUS INCL...
- Publication number 20220351947
- Publication date Nov 3, 2022
- Samsung Electronics Co., Ltd.
- Kuihyun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20210111056
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Kuihyun Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRIP APPARATUS AND SUBSTRATE INSPECTION SYSTEM INCLUDING THE SAME,...
- Publication number 20190092580
- Publication date Mar 28, 2019
- Samsung Electronics Co., Ltd.
- KUIHYUN YOON
- G01 - MEASURING TESTING
Information Patent Application
Optical Inspection System
- Publication number 20160290933
- Publication date Oct 6, 2016
- Samsung Electronics Co., Ltd.
- Wonguk Seo
- G01 - MEASURING TESTING

Kuihyun YOON

Person

Patents Grantslast 30 patents

Etching apparatus

Grip apparatus and substrate inspection system including the same,...

Optical inspection system

Patents Applicationslast 30 patents

COOLANT TUBE BLOCK ASSEMBLY AND SEMICONDUCTOR PROCESSING DEVICE INC...

PLASMA PROCESSING APPARATUS AND METHOD

SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLU...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND...

METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...

PLASMA CONFINEMENT RING, SEMICONDUCTOR MANUFACTURING APPARATUS INCL...

ETCHING APPARATUS

GRIP APPARATUS AND SUBSTRATE INSPECTION SYSTEM INCLUDING THE SAME,...

Optical Inspection System