Kul B. Bhasin

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Schaumburg, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for end point detection during plasma etching
- Patent number 4,198,261
- Issue date Apr 15, 1980
- Gould Inc.
- Heinz H. Busta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...