Kul INN

Follow

Person

Seongnam-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method of exposure using extreme ultraviolet and method of manufact...
- Patent number 11,490,499
- Issue date Nov 1, 2022
- Samsung Electronics Co., Ltd.
- Sungho Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for monitoring process chamber
- Patent number 10,971,343
- Issue date Apr 6, 2021
- Samsung Electronics Co., Ltd.
- Protopopov Vladimir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate measuring apparatus and plasma treatment ap...
- Patent number 10,481,005
- Issue date Nov 19, 2019
- Samsung Electronics Co., Ltd.
- Se Jin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for monitoring process chamber
- Patent number 10,229,818
- Issue date Mar 12, 2019
- Samsung Electronics Co., Ltd.
- Protopopov Vladimir
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF EXPOSURE USING EXTREME ULTRAVIOLET AND METHOD OF MANUFACT...
- Publication number 20220070992
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- SUNGHO JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS AND PLASMA TREATMENT AP...
- Publication number 20190323893
- Publication date Oct 24, 2019
- Samsung Electronics Co., Ltd.
- SE JIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MONITORING PROCESS CHAMBER
- Publication number 20190164731
- Publication date May 30, 2019
- Samsung Electronics Co., Ltd.
- Protopopov VLADIMIR
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
APPARATUS FOR MONITORING PROCESS CHAMBER
- Publication number 20170213710
- Publication date Jul 27, 2017
- Samsung Electronics Co., Ltd.
- Protopopov VLADIMIR
- G06 - COMPUTING CALCULATING COUNTING