Kumayasu Yoshii

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Osaka-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method and apparatus
- Patent number 6,355,569
- Issue date Mar 12, 2002
- International Business Machines Corporation
- Masao Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Dry etching method and apparatus
- Publication number 20020058419
- Publication date May 16, 2002
- Masao Shimizu
- H01 - BASIC ELECTRIC ELEMENTS