Kumiko FUKUE

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Imaging apparatus and imaging method
- Patent number 10,113,859
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Kenji Ueyama
- G01 - MEASURING TESTING
Information Patent Grant
Spectroscopic ellipsometer, film thickness measuring apparatus, and...
- Patent number 7,929,139
- Issue date Apr 19, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Spectroscopic ellipsometer and ellipsometry
- Patent number 7,864,318
- Issue date Jan 4, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko Fukue
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for detecting position of substrate, ellipsometer, and fi...
- Patent number 7,557,919
- Issue date Jul 7, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko Fukue
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGING APPARATUS AND IMAGING METHOD
- Publication number 20170167847
- Publication date Jun 15, 2017
- SCREEN Holdings Co., Ltd.
- Kenji UEYAMA
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC ELLIPSOMETER AND ELLIPSOMETRY
- Publication number 20090109438
- Publication date Apr 30, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko FUKUE
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC ELLIPSOMETER, FILM THICKNESS MEASURING APPARATUS, AND...
- Publication number 20090059228
- Publication date Mar 5, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR DETECTING POSITION OF SUBSTRATE, ELLIPSOMETER, AND FI...
- Publication number 20090059229
- Publication date Mar 5, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko FUKUE
- G01 - MEASURING TESTING