Kumiko Yamazaki

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 9,530,666
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Hideki Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ashing method and apparatus therefor
- Patent number 7,892,986
- Issue date Feb 22, 2011
- Tokyo Electron Limited
- Shigeru Tahara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20150235861
- Publication date Aug 20, 2015
- Tokyo Electron Limited
- Hideki Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090188428
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Isamu SAKURAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHECKING SUBSTRATE EDGE PROCESSING APPARATUS
- Publication number 20090188892
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Kumiko Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090008034
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASHING METHOD AND APPARATUS THEREFOR
- Publication number 20080233766
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Shigeru Tahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AN...
- Publication number 20070197040
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS