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Koshi City, JP
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last 30 patents
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Patent Grant
Substrate processing system
Patent number
10,236,196
Issue date
Mar 19, 2019
Tokyo Electron Limited
Yukiyoshi Saito
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20170309504
Publication date
Oct 26, 2017
TOKYO ELECTRON LIMITED
Yukiyoshi Saito
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20150132086
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Yukiyoshi Saito
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS