Kumpei Tada

Person

  • Koshi City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing system

    • Patent number 10,236,196
    • Issue date Mar 19, 2019
    • Tokyo Electron Limited
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM

    • Publication number 20170309504
    • Publication date Oct 26, 2017
    • TOKYO ELECTRON LIMITED
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM

    • Publication number 20150132086
    • Publication date May 14, 2015
    • TOKYO ELECTRON LIMITED
    • Yukiyoshi Saito
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS