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Kun-Feng Huang
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Yongkang City, TW
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last 30 patents
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Patent Grant
Robotic arm for transporting substrate in ultrahigh vacuum
Patent number
8,528,438
Issue date
Sep 10, 2013
Chung-Shan Institute of Science and Technology, Armaments Bureau, Ministry of...
Hsien-Chung Chen
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Patents Applications
last 30 patents
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Patent Application
ROBOTIC ARM FOR TRANSPORTING SUBSTRATE IN ULTRAHIGH VACUUM
Publication number
20110120251
Publication date
May 26, 2011
HSIEN-CHUNG CHEN
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS