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KUNG-CHAO CHEN
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HSINCHU, TW
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Patents Grants
last 30 patents
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Patent Grant
True defect monitoring through repeating defect deletion
Patent number
6,684,164
Issue date
Jan 27, 2004
Macronix International Co., Ltd.
Kung-Yi Chen
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS OF MONITORING PLASMA PROCESS TOOL
Publication number
20080088827
Publication date
Apr 17, 2008
Macronix International Co., Ltd.
SHING-ANN LUO
G01 - MEASURING TESTING