Kunihiko Fujimoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,668,494
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, editing apparatus and method and no...
- Patent number 10,254,816
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Seiichiro Yuasa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180085769
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, EDITING APPARATUS AND METHOD AND NO...
- Publication number 20150220136
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Seiichiro YUASA
- G06 - COMPUTING CALCULATING COUNTING