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Kunihiko Hinata
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Beverly, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Etchant for use in a semiconductor processing method and system
Patent number
6,465,359
Issue date
Oct 15, 2002
Tokyo Electron Ltd.
Masahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor processing method and system using C.sub.5 F.sub.8
Patent number
6,159,862
Issue date
Dec 12, 2000
Tokyo Electron Ltd.
Masahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHANT FOR USE IN A SEMICONDUCTOR PROCESSING METHOD AND SYSTEM
Publication number
20020030174
Publication date
Mar 14, 2002
MASAHIRO YAMADA
H01 - BASIC ELECTRIC ELEMENTS