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Kunihiko Koroyasu
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Kudamatsu, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus, protecting layer therefor and installa...
Patent number
7,052,731
Issue date
May 30, 2006
Hitachi High-Technologies Corporation
Kunihiko Koroyasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching method
Patent number
6,914,005
Issue date
Jul 5, 2005
Hitachi High-Technologies Corporation
Muneo Furuse
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing apparatus, protecting layer therefor and installa...
Publication number
20050045107
Publication date
Mar 3, 2005
Kunihiko Koroyasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma etching method
Publication number
20030166343
Publication date
Sep 4, 2003
Muneo Furuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus, protecting layer therefor and installa...
Publication number
20030159778
Publication date
Aug 28, 2003
Kunihiko Koroyasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...