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Kunihiko Sakurai

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate holding apparatus
    • Patent number 7,850,509
    • Issue date Dec 14, 2010
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 7,632,378
    • Issue date Dec 15, 2009
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus and polishing apparatus
    • Patent number 7,632,173
    • Issue date Dec 15, 2009
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus
    • Patent number 7,491,117
    • Issue date Feb 17, 2009
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Method for estimating polishing profile or polishing amount, polish...
    • Patent number 7,361,076
    • Issue date Apr 22, 2008
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus and polishing apparatus
    • Patent number 7,311,585
    • Issue date Dec 25, 2007
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 7,270,594
    • Issue date Sep 18, 2007
    • Ebara Corporation
    • Takuji Hayama
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Method for estimating polishing profile or polishing amount, polish...
    • Patent number 7,234,999
    • Issue date Jun 26, 2007
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing method
    • Patent number 7,163,895
    • Issue date Jan 16, 2007
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate polishing machine
    • Patent number 7,156,725
    • Issue date Jan 2, 2007
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 7,156,719
    • Issue date Jan 2, 2007
    • Ebara Corporation
    • Takuji Hayama
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Method for estimating polishing profile or polishing amount, polish...
    • Patent number 7,150,673
    • Issue date Dec 19, 2006
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 7,101,255
    • Issue date Sep 5, 2006
    • Ebara Corporation
    • Seiji Katsuoka
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus
    • Patent number 7,083,507
    • Issue date Aug 1, 2006
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding device and polishing device
    • Patent number 7,033,260
    • Issue date Apr 25, 2006
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,953,390
    • Issue date Oct 11, 2005
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,942,541
    • Issue date Sep 13, 2005
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,918,814
    • Issue date Jul 19, 2005
    • Ebara Corporation
    • Seiji Katsuoka
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,878,044
    • Issue date Apr 12, 2005
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus
    • Patent number 6,852,019
    • Issue date Feb 8, 2005
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,682,408
    • Issue date Jan 27, 2004
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holder and substrate transfer apparatus using the same
    • Patent number 6,578,891
    • Issue date Jun 17, 2003
    • Ebara Corporation
    • Hiroo Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,413,146
    • Issue date Jul 2, 2002
    • Ebara Corporation
    • Seiji Katsuoka
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus and method
    • Patent number 6,402,597
    • Issue date Jun 11, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,358,131
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,358,128
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,354,922
    • Issue date Mar 12, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,332,826
    • Issue date Dec 25, 2001
    • Ebara Corporation
    • Seiji Katsuoka
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,283,822
    • Issue date Sep 4, 2001
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,227,954
    • Issue date May 8, 2001
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING

Patents Applicationslast 30 patents