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Kunihiko Sato
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Tokyo, JP
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last 30 patents
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Patent Grant
EFEM
Patent number
9,704,727
Issue date
Jul 11, 2017
Sinfonia Technology Co., Ltd.
Mikio Segawa
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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EFEM
Publication number
20150170945
Publication date
Jun 18, 2015
SINFONIA TECHNOLOGY CO., LTD.
Mikio Segawa
H01 - BASIC ELECTRIC ELEMENTS