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Kunihiko Shiozawa
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Yokohama, JP
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last 30 patents
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Patent Grant
Pattern data inspection method and storage medium
Patent number
6,598,185
Issue date
Jul 22, 2003
Fujitsu Limited
Showgo Matsui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
System for inspecting exposure pattern data of semiconductor integr...
Patent number
4,774,461
Issue date
Sep 27, 1988
Fujitsu Limited
Shogo Matsui
G06 - COMPUTING CALCULATING COUNTING