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Kunihiko Uchida
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Tokyo, JP
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last 30 patents
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Patent Grant
Method and apparatus for automatic focusing of scanning electron mi...
Patent number
5,130,540
Issue date
Jul 14, 1992
Jeol Ltd.
Atsushi Yamada
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electromagnetic lens
Patent number
5,065,027
Issue date
Nov 12, 1991
Jeol Ltd.
Susumu Takashima
H01 - BASIC ELECTRIC ELEMENTS