Kunihiro Furuya

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection system
- Patent number 12,117,485
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection system
- Patent number 11,762,012
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection system
- Patent number 11,567,123
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Position correction method, inspection apparatus, and probe card
- Patent number 11,119,122
- Issue date Sep 14, 2021
- Tokyo Electron Limited
- Kunihiro Furuya
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection system, wafer inspection apparatus and prober
- Patent number 11,061,071
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Test head and wafer inspection apparatus
- Patent number 10,976,364
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system, wafer inspection apparatus and prober
- Patent number 10,753,972
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of contacting substrate with probe card
- Patent number 9,863,977
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Kunihiro Furuya
- G01 - MEASURING TESTING
Information Patent Grant
Maintenance carriage for wafer inspection apparatus and maintenance...
- Patent number 9,671,459
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support body for contact terminals and probe card
- Patent number 9,140,726
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Jun Mochizuki
- G01 - MEASURING TESTING
Information Patent Grant
Contact structure for inspection
- Patent number 8,310,257
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Shinichiro Takase
- G01 - MEASURING TESTING
Information Patent Grant
Probe method, prober, and electrode reducing/plasma-etching process...
- Patent number 7,750,654
- Issue date Jul 6, 2010
- Octec Inc.
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Grant
Probe pins zero-point detecting method, and prober
- Patent number 7,023,226
- Issue date Apr 4, 2006
- Octec Inc.
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Grant
Temperature managing apparatus for multi-stage container
- Patent number 6,239,602
- Issue date May 29, 2001
- Tokyo Electron Limited
- Yoichi Nakagomi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor wafer holder with spring-mounted temperature measurem...
- Patent number 6,084,215
- Issue date Jul 4, 2000
- Tokyo Electron Limited
- Kunihiro Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus, transportation apparatus, and temperature con...
- Patent number 5,708,222
- Issue date Jan 13, 1998
- Tokyo Electron Limited
- Toshihiro Yonezawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20240019487
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20230134360
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20210190861
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER
- Publication number 20200400743
- Publication date Dec 24, 2020
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
TEST HEAD AND WAFER INSPECTION APPARATUS
- Publication number 20200348358
- Publication date Nov 5, 2020
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER
- Publication number 20200064400
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
Position Correction Method, Inspection Apparatus, and Probe Card
- Publication number 20190277884
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Kunihiro FURUYA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER
- Publication number 20170234924
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF CONTACTING SUBSTRATE WITH PROBE CARD
- Publication number 20150219687
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Kunihiro Furuya
- G01 - MEASURING TESTING
Information Patent Application
MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE...
- Publication number 20150115991
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
SUPPORT BODY FOR CONTACT TERMINALS AND PROBE CARD
- Publication number 20130093446
- Publication date Apr 18, 2013
- TOKYO ELECTRON LIMITED
- Jun MOCHIZUKI
- G01 - MEASURING TESTING
Information Patent Application
CONTACT STRUCTURE FOR INSPECTION
- Publication number 20110043232
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Shinichiro TAKASE
- G01 - MEASURING TESTING
Information Patent Application
Probe method, prober, and electrode reducing/plasma-etching process...
- Publication number 20050151549
- Publication date Jul 14, 2005
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Application
Probe pins zero-point detecting method, and prober
- Publication number 20050052195
- Publication date Mar 10, 2005
- Katsuya Okumura
- G01 - MEASURING TESTING

Kunihiro Furuya

Person

Patents Grantslast 30 patents

Wafer inspection system

Wafer inspection system

Wafer inspection system

Position correction method, inspection apparatus, and probe card

Wafer inspection system, wafer inspection apparatus and prober

Test head and wafer inspection apparatus

Wafer inspection system, wafer inspection apparatus and prober

Method of contacting substrate with probe card

Maintenance carriage for wafer inspection apparatus and maintenance...

Support body for contact terminals and probe card

Contact structure for inspection

Probe method, prober, and electrode reducing/plasma-etching process...

Probe pins zero-point detecting method, and prober

Temperature managing apparatus for multi-stage container

Semiconductor wafer holder with spring-mounted temperature measurem...

Inspection apparatus, transportation apparatus, and temperature con...

Patents Applicationslast 30 patents

WAFER INSPECTION SYSTEM

WAFER INSPECTION SYSTEM

WAFER INSPECTION SYSTEM

WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER

TEST HEAD AND WAFER INSPECTION APPARATUS

WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER

Position Correction Method, Inspection Apparatus, and Probe Card

WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER

METHOD OF CONTACTING SUBSTRATE WITH PROBE CARD

MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE...

SUPPORT BODY FOR CONTACT TERMINALS AND PROBE CARD

CONTACT STRUCTURE FOR INSPECTION

Probe method, prober, and electrode reducing/plasma-etching process...

Probe pins zero-point detecting method, and prober