Membership
Tour
Register
Log in
Kunihiro Kaneuchi
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate-processing apparatus with buffer mechanism and substrate-...
Patent number
7,690,881
Issue date
Apr 6, 2010
ASM Japan K.K.
Takayuki Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Substrate-processing apparatus with buffer mechanism and substrate-...
Publication number
20080056854
Publication date
Mar 6, 2008
ASM JAPAN K.K.
Takayuki Yamagishi
H01 - BASIC ELECTRIC ELEMENTS