Kunihiro Sato

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Power supply system, plasma processing apparatus and power supply c...
- Patent number 10,056,230
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POWER SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS AND POWER SUPPLY C...
- Publication number 20160284514
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS