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Kunihiro YAMAUCHI
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Ube-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Dry etching method, method for manufacturing semiconductor device,...
Patent number
11,618,954
Issue date
Apr 4, 2023
Central Glass Company, Limited
Yuuta Takeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry etching method and β-diketone-filled container
Patent number
11,335,573
Issue date
May 17, 2022
Cental Glass Company, Limited
Kunihiro Yamauchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method and etching device
Patent number
11,282,714
Issue date
Mar 22, 2022
Central Glass Company, Limited
Akifumi Yao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching device
Patent number
10,957,554
Issue date
Mar 23, 2021
Central Glass Company, Limited
Kunihiro Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Naturally oxidized film removing method and naturally oxidized film...
Patent number
10,460,946
Issue date
Oct 29, 2019
Tokyo Electron Limited
Jun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method, method of manufacturing semiconductor device, subs...
Patent number
10,156,012
Issue date
Dec 18, 2018
Kokusai Electric Corporation
Kenji Kameda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method and etching apparatus
Patent number
9,991,138
Issue date
Jun 5, 2018
Tokyo Electron Limited
Jun Lin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SURFACE TREATMENT METHOD, DRY ETCHING METHOD, CLEANING METHOD, PROD...
Publication number
20240194490
Publication date
Jun 13, 2024
Central Glass Company, Limited
Kunihiro YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE TREATMENT METHOD, DRY ETCHING METHOD, CLEANING METHOD, SEMI...
Publication number
20240186147
Publication date
Jun 6, 2024
Central Glass Company, Limited
Hikaru KITAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry Etching Method, Method for Producing Semiconductor Device, and...
Publication number
20220415667
Publication date
Dec 29, 2022
Central Glass Company, Limited
Kunihiro YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,...
Publication number
20220056593
Publication date
Feb 24, 2022
Central Glass Company, Limited
Yuuta TAKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD AND ETCHING DEVICE
Publication number
20210287915
Publication date
Sep 16, 2021
Central Glass Company, Limited
Akifumi YAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching Method and Etching Device
Publication number
20200066541
Publication date
Feb 27, 2020
Central Glass Company, Limited
Kunihiro YAMAUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dry Etching Method and Beta-Diketone-Filled Container
Publication number
20190348307
Publication date
Nov 14, 2019
Central Glass Company, Limited
Kunihiro YAMAUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NATURALLY OXIDIZED FILM REMOVING METHOD AND NATURALLY OXIDIZED FILM...
Publication number
20180211844
Publication date
Jul 26, 2018
TOKYO ELECTRON LIMITED
Jun LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wet Etching Method and Etching Solution
Publication number
20180138053
Publication date
May 17, 2018
Central Glass Company, Limited
Akifumi YAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...
Publication number
20180057936
Publication date
Mar 1, 2018
Hitachi Kokusai Electric Inc.
Kenji KAMEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20170032990
Publication date
Feb 2, 2017
TOKYO ELECTRON LIMITED
Jun LIN
H01 - BASIC ELECTRIC ELEMENTS