Kunimasa Matsushita

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning device, abnormality determination method of subs...
- Patent number 11,911,806
- Issue date Feb 27, 2024
- Ebara Corporation
- Masumi Nishijima
- G01 - MEASURING TESTING
Information Patent Grant
Non-transitory computer-readable storage medium storing a program o...
- Patent number 11,267,097
- Issue date Mar 8, 2022
- Ebara Corporation
- Kazuya Otsu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,737,973
- Issue date Aug 22, 2017
- Ebara Corporation
- Mitsunori Sugiyama
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing unit
- Patent number 9,165,799
- Issue date Oct 20, 2015
- Ebara Corporation
- Xinming Wang
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER DETECTION DEVICE AND DROPLET GUIDE MEMBER
- Publication number 20240213061
- Publication date Jun 27, 2024
- EBARA CORPORATION
- TOMOAKI FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, ABNORMALITY DETERMINATION METHOD OF SUBS...
- Publication number 20220258217
- Publication date Aug 18, 2022
- EBARA CORPORATION
- MASUMI NISHIJIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM
- Publication number 20210008684
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Kunimasa Matsushita
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR DETERMINING POLISHING PAD HEIGHT AND POLISHING SYSTEM
- Publication number 20200061774
- Publication date Feb 27, 2020
- EBARA CORPORATION
- KUNIMASA MATSUSHITA
- B24 - GRINDING POLISHING
Information Patent Application
NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM O...
- Publication number 20190118330
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kazuya OTSU
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150290767
- Publication date Oct 15, 2015
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20130000671
- Publication date Jan 3, 2013
- Xinming WANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING UNIT
- Publication number 20120318304
- Publication date Dec 20, 2012
- Xinming WANG
- B08 - CLEANING

Kunimasa Matsushita

Person

Patents Grantslast 30 patents

Substrate cleaning device, abnormality determination method of subs...

Non-transitory computer-readable storage medium storing a program o...

Substrate processing apparatus

Substrate processing method and substrate processing unit

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER DETECTION DEVICE AND DROPLET GUIDE MEMBER

SUBSTRATE CLEANING DEVICE, ABNORMALITY DETERMINATION METHOD OF SUBS...

SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM

METHOD FOR DETERMINING POLISHING PAD HEIGHT AND POLISHING SYSTEM

NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM O...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING UNIT