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Switch mechanism
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Patent number 5,502,290
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Issue date Mar 26, 1996
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Hitachi, Ltd.
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Osamu Koyanagi
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H01 - BASIC ELECTRIC ELEMENTS
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Ion source device
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Patent number 4,847,476
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Issue date Jul 11, 1989
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Hitachi, Ltd.
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Tadashi Sato
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H01 - BASIC ELECTRIC ELEMENTS
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Ion source
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Patent number 4,739,169
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Issue date Apr 19, 1988
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Hitachi, Ltd.
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Yukio Kurosawa
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H01 - BASIC ELECTRIC ELEMENTS
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