Kunio Miyauchi

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Particle monitoring method and particle monitoring system
- Patent number 9,612,178
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Kunio Miyauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle distribution analysis method for computer readable storage...
- Patent number 8,768,644
- Issue date Jul 1, 2014
- Tokyo Electron Limited
- Kunio Miyauchi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate cleaning method
- Patent number 8,585,831
- Issue date Nov 19, 2013
- Tokyo Electron Limited
- Hidefumi Matsui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE MONITORING METHOD AND PARTICLE MONITORING APPARATUS
- Publication number 20140182357
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Kunio Miyauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20120031434
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Hidefumi Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE DISTRIBUTION ANALYSIS METHOD FOR COMPUTER READABLE STORAGE...
- Publication number 20120029863
- Publication date Feb 2, 2012
- TOKYO ELECTRON LIMITED
- Kunio Miyauchi
- G06 - COMPUTING CALCULATING COUNTING