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Kunio Ootani
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Tokyo, JP
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last 30 patents
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Patent Grant
Input signal analyzing system and control apparatus using same
Patent number
7,899,557
Issue date
Mar 1, 2011
ASM Japan K.K.
Masahiro Takizawa
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
Input signal analyzing system and control apparatus using same
Publication number
20060218312
Publication date
Sep 28, 2006
ASM JAPAN K.K.
Masahiro Takizawa
G05 - CONTROLLING REGULATING