Kunio Sano

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspecting semiconductor integrated circui...
- Patent number 6,084,419
- Issue date Jul 4, 2000
- Tokyo Electron Limited
- Takashi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Probe device
- Patent number 6,072,325
- Issue date Jun 6, 2000
- Tokyo Electron Kabushiki Kaisha
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for aligning a semiconductor wafer with an inspection con...
- Patent number 5,999,268
- Issue date Dec 7, 1999
- Tokyo Electron Limited
- Toshihiro Yonezawa
- G01 - MEASURING TESTING
Information Patent Grant
Probing method and device with contact film wiper feature
- Patent number 5,982,183
- Issue date Nov 9, 1999
- Tokyo Electron Limited
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Membrane probing of circuits
- Patent number 5,847,571
- Issue date Dec 8, 1998
- MicroModule Systems
- Ken Kuang-Fu Liu
- G01 - MEASURING TESTING
Information Patent Grant
Probe card cleaning apparatus, probe apparatus with the cleaning ap...
- Patent number 5,778,485
- Issue date Jul 14, 1998
- Tokyo Electron Limited
- Kunio Sano
- B08 - CLEANING
Information Patent Grant
High-frequency-transmission printed wiring board, probe card, and p...
- Patent number 5,748,006
- Issue date May 5, 1998
- Tokyo Electron Limited
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Probing test apparatus
- Patent number 5,703,494
- Issue date Dec 30, 1997
- Tokyo Electron Limited
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device checking method
- Patent number 5,665,610
- Issue date Sep 9, 1997
- Matsushita Electric Industrial Co., Ltd.
- Yoshiro Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Probe apparatus
- Patent number 5,604,446
- Issue date Feb 18, 1997
- Tokyo Electron Limited
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Probing method and device
- Patent number 5,559,446
- Issue date Sep 24, 1996
- Tokyo Electron Kabushiki Kaisha
- Kunio Sano
- G01 - MEASURING TESTING
Information Patent Grant
Probe device
- Patent number 5,550,482
- Issue date Aug 27, 1996
- Tokyo Electron Kabushiki Kaisha
- Kunio Sano
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Method and apparatus for inspecting semiconductor integrated circui...

Probe device

Apparatus for aligning a semiconductor wafer with an inspection con...

Probing method and device with contact film wiper feature

Membrane probing of circuits

Probe card cleaning apparatus, probe apparatus with the cleaning ap...

High-frequency-transmission printed wiring board, probe card, and p...

Probing test apparatus

Semiconductor device checking method

Probe apparatus

Probing method and device

Probe device