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Kunio Takano
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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
Patent number
11,908,712
Issue date
Feb 20, 2024
Tokyo Electron Limited
Toshiharu Hirata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate transfer method
Patent number
11,127,615
Issue date
Sep 21, 2021
Tokyo Electron Limited
Takafumi Matsuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate processing method, and contr...
Patent number
11,086,286
Issue date
Aug 10, 2021
Tokyo Electron Limited
Toshiharu Hirata
G05 - CONTROLLING REGULATING
Information
Patent Grant
Semiconductor manufacturing system
Patent number
9,223,305
Issue date
Dec 29, 2015
Tokyo Electron Limited
Gaku Ikeda
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
Publication number
20220148898
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Takafumi Matsuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SUBSTRATE TRANSFER METHOD, A...
Publication number
20220093425
Publication date
Mar 24, 2022
TOKYO ELECTRON LIMITED
Toshiharu Hirata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
Publication number
20200012254
Publication date
Jan 9, 2020
TOKYO ELECTRON LIMITED
Toshiharu HIRATA
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
Publication number
20200013654
Publication date
Jan 9, 2020
TOKYO ELECTRON LIMITED
Takafumi Matsuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PROCESSING METHOD AND MICROWAVE PROCESSING APPARATUS
Publication number
20140042153
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Kouji Shimomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
Publication number
20130013240
Publication date
Jan 10, 2013
TOKYO ELECTON LIMITED
Gaku Ikeda
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND STORA...
Publication number
20100168889
Publication date
Jul 1, 2010
TOKYO ELECTRON LIMITED
Koichi SEKIDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing System
Publication number
20090259335
Publication date
Oct 15, 2009
Tokyo Electron Limited
Gaku Ikeda
H01 - BASIC ELECTRIC ELEMENTS