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Kunio YAMADA
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Kyoto-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,670,523
Issue date
Jun 6, 2023
SCREEN Holdings Co., Ltd.
Takashi Ota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,342,201
Issue date
May 24, 2022
SCREEN Holdings Co., Ltd.
Tetsuo Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing device and substrate processing method
Patent number
11,315,820
Issue date
Apr 26, 2022
SCREEN Holdings Co., Ltd.
Tetsuo Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,031,235
Issue date
Jun 8, 2021
SCREEN Holdings Co., Ltd.
Hiromichi Kaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,777,404
Issue date
Sep 15, 2020
SCREEN Holdings Co., Ltd.
Hiromichi Kaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method usin...
Patent number
10,580,668
Issue date
Mar 3, 2020
SCREEN Holdings Co., Ltd.
Taiki Hinode
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230307264
Publication date
Sep 28, 2023
SCREEN Holdings Co., Ltd.
Takashi OTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200381244
Publication date
Dec 3, 2020
SCREEN Holdings Co., Ltd.
Hiromichi KABA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200312679
Publication date
Oct 1, 2020
SCREEN Holdings Co., Ltd.
Tetsuo ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SEMIC...
Publication number
20200312697
Publication date
Oct 1, 2020
SCREEN Holdings Co., Ltd.
Tetsuo ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20190228990
Publication date
Jul 25, 2019
SCREEN Holdings Co., Ltd.
Taiki HINODE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180337068
Publication date
Nov 22, 2018
SCREEN Holdings Co., Ltd.
Takashi OTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170243735
Publication date
Aug 24, 2017
SCREEN Holdings Co., Ltd.
Hiromichi KABA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20150262737
Publication date
Sep 17, 2015
SCREEN Holdings Co., Ltd.
Taiki HINODE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20070130716
Publication date
Jun 14, 2007
Kunio Yamada
H01 - BASIC ELECTRIC ELEMENTS