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Kunito Hayashi
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Tokyo, JP
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last 30 patents
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Patent Grant
Aberration evaluation pattern, aberration evaluation method, aberra...
Patent number
8,158,310
Issue date
Apr 17, 2012
Ricoh Company, Ltd.
Hiroyuki Miyata
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Electron-beam writing device and electron-beam writing method
Patent number
6,989,536
Issue date
Jan 24, 2006
Konica Minolta Holdings, Inc.
Osamu Masuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ABERRATION EVALUATION PATTERN, ABERRATION EVALUATION METHOD, ABERRA...
Publication number
20100227200
Publication date
Sep 9, 2010
RICOH COMPANY, LTD.
Hiroyuki Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron-beam writing device and electron-beam writing method
Publication number
20050018496
Publication date
Jan 27, 2005
Konica Minolta Holdings, Inc.
Osamu Masuda
B82 - NANO-TECHNOLOGY