Kuo-Feng TSENG

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam inspection apparatus stage positioning
- Patent number 11,302,512
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Marcel Koenraad Marie Baggen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION DAMPING AND RESONANCE REDUCTION FOR ION PUMP
- Publication number 20230114067
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Long DI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING
- Publication number 20200203118
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- H01 - BASIC ELECTRIC ELEMENTS