Kuo-Lung Tang

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Use of ammonia for etching organic low-k dielectrics
- Patent number 7,105,454
- Issue date Sep 12, 2006
- Lam Research Corporation
- Chok W. Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method providing an improved bi-layer photoresist pattern
- Patent number 7,049,052
- Issue date May 23, 2006
- Lam Research Corporation
- Hanzhong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of ammonia for etching organic low-k dielectrics
- Patent number 6,893,969
- Issue date May 17, 2005
- Lam Research Corporation
- Chok W. Ho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method providing an improved bi-layer photoresist pattern
- Publication number 20060166145
- Publication date Jul 27, 2006
- Hanzhong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Use of ammonia for etching organic low-k dielectrics
- Publication number 20050003676
- Publication date Jan 6, 2005
- Chok W. Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method providing an improved bi-layer photoresist pattern
- Publication number 20040224264
- Publication date Nov 11, 2004
- Lam Research Corporation
- Hanzhong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Use of ammonia for etching organic low-k dielectrics
- Publication number 20020108929
- Publication date Aug 15, 2002
- Lam Research Corporation
- Chok W. Ho
- H01 - BASIC ELECTRIC ELEMENTS