Kuo-Tai Teng

Person

Poway, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Determination of measurement error in an etalon
- Patent number 11,860,036
- Issue date Jan 2, 2024
- Cymer, LLC
- Russell Allen Burdt
- G01 - MEASURING TESTING
Information Patent Grant
Method of compensating wavelength error induced by repetition rate...
- Patent number 11,803,126
- Issue date Oct 31, 2023
- Cymer, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed light beam spectral feature control
- Patent number 9,966,725
- Issue date May 8, 2018
- Cymer, LLC
- Kuo-Tai Teng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
- Publication number 20240036475
- Publication date Feb 1, 2024
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF MODULATING A WAVELENGTH OF AN EXCIMER L...
- Publication number 20240006838
- Publication date Jan 4, 2024
- CYMER, LLC
- James Michael Simonelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
- Publication number 20230223734
- Publication date Jul 13, 2023
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINATION OF MEASUREMENT ERROR IN AN ETALON
- Publication number 20230142333
- Publication date May 11, 2023
- CYMER, LLC
- Russell Allen Burdt
- G01 - MEASURING TESTING
Information Patent Application
PREDICTIVE CONTROL OF A PULSED LIGHT BEAM
- Publication number 20230055090
- Publication date Feb 23, 2023
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
- Publication number 20220269181
- Publication date Aug 25, 2022
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH
- Publication number 20220231474
- Publication date Jul 21, 2022
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS

Kuo-Tai Teng

Person

Patents Grantslast 30 patents

Determination of measurement error in an etalon

Method of compensating wavelength error induced by repetition rate...

Pulsed light beam spectral feature control

Patents Applicationslast 30 patents

METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...

APPARATUS FOR AND METHOD OF MODULATING A WAVELENGTH OF AN EXCIMER L...

SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH

DETERMINATION OF MEASUREMENT ERROR IN AN ETALON

PREDICTIVE CONTROL OF A PULSED LIGHT BEAM

METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...

APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH