Kuo-wei Hong

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming insulation film using plasma treatment cycles
- Patent number 8,647,722
- Issue date Feb 11, 2014
- ASM Japan K.K.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric film by modified PEALD method
- Patent number 8,415,259
- Issue date Apr 9, 2013
- ASM Japan K.K.
- Woo Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming conformal film having si-N bonds on high-aspect r...
- Patent number 8,394,466
- Issue date Mar 12, 2013
- ASM Japan K.K.
- Kuo-wei Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming stress-tuned dielectric film having Si-N bonds by...
- Patent number 8,334,219
- Issue date Dec 18, 2012
- ASM Japan K.K.
- Woo-Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric film having Si-N bonds by modified...
- Patent number 8,173,554
- Issue date May 8, 2012
- ASM Japan K.K.
- Woo Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric film having Si-N bonds by modified...
- Patent number 8,129,291
- Issue date Mar 6, 2012
- ASM Japan K.K.
- Woo Jin Lee

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DEPOSITING DIELECTRIC FILM BY MODIFIED PEALD METHOD
- Publication number 20120220139
- Publication date Aug 30, 2012
- ASM JAPAN K.K.
- Woo-Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Conformal Film Having Si-N Bonds on High-Aspect R...
- Publication number 20120058282
- Publication date Mar 8, 2012
- ASM JAPAN K.K.
- Kuo-wei Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING DIELECTRIC FILM HAVING Si-N BONDS BY MODIFIED...
- Publication number 20110086516
- Publication date Apr 14, 2011
- ASM JAPAN K.K.
- Woo Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Stress-Tuned Dielectric Film Having Si-N Bonds by...
- Publication number 20110014795
- Publication date Jan 20, 2011
- ASM JAPAN K.K.
- Woo Jin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Insulation Film Using Plasma Treatment Cycles
- Publication number 20100124618
- Publication date May 20, 2010
- ASM JAPAN K.K.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kuo-wei Hong

Person

Patents Grantslast 30 patents

Method of forming insulation film using plasma treatment cycles

Method of depositing dielectric film by modified PEALD method

Method of forming conformal film having si-N bonds on high-aspect r...

Method of forming stress-tuned dielectric film having Si-N bonds by...

Method of depositing dielectric film having Si-N bonds by modified...

Method of depositing dielectric film having Si-N bonds by modified...

Patents Applicationslast 30 patents

METHOD OF DEPOSITING DIELECTRIC FILM BY MODIFIED PEALD METHOD

Method of Forming Conformal Film Having Si-N Bonds on High-Aspect R...

METHOD OF DEPOSITING DIELECTRIC FILM HAVING Si-N BONDS BY MODIFIED...

Method of Forming Stress-Tuned Dielectric Film Having Si-N Bonds by...

Method of Forming Insulation Film Using Plasma Treatment Cycles