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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Extreme ultraviolet mask and method of manufacturing the same
Patent number
12,181,791
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet mask and method of manufacturing the same
Patent number
11,774,844
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet mask and method of manufacturing the same
Patent number
11,275,301
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET MASK
Publication number
20250093764
Publication date
Mar 20, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
Publication number
20230367195
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
Publication number
20220197127
Publication date
Jun 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
Publication number
20200073225
Publication date
Mar 5, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY