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Arnhem, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and method of manufacturing a device
Patent number
9,606,445
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic Apparatus and Method of Manufacturing a Device
Publication number
20150192861
Publication date
Jul 9, 2015
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY