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Kurt Franke
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Dresden, DE
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last 30 patents
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Patent Grant
Diffraction-optical component, illumination system and exposure sys...
Patent number
6,885,491
Issue date
Apr 26, 2005
Carl-Zeiss-Stiftung (trading as Carl Zeiss)
Martin Ross-Messemer
G02 - OPTICS
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last 30 patents
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Patent Application
Diffraction-optical component, illumination system and exposure sys...
Publication number
20030007712
Publication date
Jan 9, 2003
Martin Ross-Messemer
G02 - OPTICS