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Patents Grants
last 30 patents
Information
Patent Grant
Debris mitigation system and lithographic apparatus
Patent number
8,071,963
Issue date
Dec 6, 2011
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,928,412
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,629,594
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic Apparatus, and Device Manufacturing Method
Publication number
20090173360
Publication date
Jul 9, 2009
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus VAN HERPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Debris mitigation system and lithographic apparatus
Publication number
20080157006
Publication date
Jul 3, 2008
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus, and device manufacturing method
Publication number
20080083885
Publication date
Apr 10, 2008
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY