Kurt Hahn

Follow

Person

Giessen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Grant
Illumination means and inspection means having an illumination means
- Patent number 8,087,799
- Issue date Jan 3, 2012
- Vistec Semiconductor Systems GmbH
- Kurt Hahn
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Application
Illumination means and inspection means having an illumination means
- Publication number 20090086483
- Publication date Apr 2, 2009
- Vistec Semiconductor System GmbH
- Kurt Hahn
- G01 - MEASURING TESTING