Kurt Haller

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Activation of wafer particle defects for spectroscopic composition...
- Patent number 10,551,320
- Issue date Feb 4, 2020
- KLA-Tencor Corporation
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Grant
System and method for luminescent tag based wafer inspection
- Patent number 9,970,873
- Issue date May 15, 2018
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Bright-field differential interference contrast system with scannin...
- Patent number 9,052,190
- Issue date Jun 9, 2015
- KLA-Tencor Corporation
- Ali Salehpour
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness, refractive index, and extinction coefficient determ...
- Patent number 8,830,464
- Issue date Sep 9, 2014
- KLA-Tencor Corporation
- David Feiler
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Methods for correlating backside and frontside defects detected on...
- Patent number 7,968,354
- Issue date Jun 28, 2011
- KLA-Tencor Technologies Corp.
- Kurt Haller
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting an edge of a specimen
- Patent number 7,728,965
- Issue date Jun 1, 2010
- KLA-Tencor Technologies Corp.
- Kurt Lindsay Haller
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting a wafer with increased sensitivity
- Patent number 7,697,129
- Issue date Apr 13, 2010
- KLA-Tencor Technologies Corp.
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods and systems for determining a configur...
- Patent number 7,436,505
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting a wafer with increased sensitivity
- Patent number 7,372,559
- Issue date May 13, 2008
- KLA-Tencor Technologies Corp.
- Kurt L. Haller
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods And Systems For Optical Surface Defect Material Characteriz...
- Publication number 20210010949
- Publication date Jan 14, 2021
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Activation Of Wafer Particle Defects For Spectroscopic Composition...
- Publication number 20180217065
- Publication date Aug 2, 2018
- KLA-Tencor Corporation
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Enhanced Inspection and Metrology Techniques And Systems Using Brig...
- Publication number 20140268172
- Publication date Sep 18, 2014
- Ali Salehpour
- G01 - MEASURING TESTING
Information Patent Application
Film Thickness, Refractive Index, and Extinction Coefficient Determ...
- Publication number 20140125978
- Publication date May 8, 2014
- KLA-Tencor Corporation
- David Feiler
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR INSPECTING A WAFER WITH INCREASED SENSITIVITY
- Publication number 20090009754
- Publication date Jan 8, 2009
- KLA-Tencor Technologies Corporation
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Application
Computer-Implemented Methods and Systems for Determining a Configur...
- Publication number 20070229809
- Publication date Oct 4, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for inspecting a wafer with increased sensitivity
- Publication number 20070132987
- Publication date Jun 14, 2007
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for inspecting an edge of a specimen
- Publication number 20060274304
- Publication date Dec 7, 2006
- Kurt Lindsay Haller
- G01 - MEASURING TESTING

Kurt Haller

Person

Patents Grantslast 30 patents

Activation of wafer particle defects for spectroscopic composition...

System and method for luminescent tag based wafer inspection

Illumination energy management in surface inspection

Bright-field differential interference contrast system with scannin...

Film thickness, refractive index, and extinction coefficient determ...

Illumination energy management in surface inspection

Methods for correlating backside and frontside defects detected on...

Systems and methods for inspecting an edge of a specimen

Systems and methods for inspecting a wafer with increased sensitivity

Computer-implemented methods and systems for determining a configur...

Systems and methods for inspecting a wafer with increased sensitivity

Patents Applicationslast 30 patents

Methods And Systems For Optical Surface Defect Material Characteriz...

Activation Of Wafer Particle Defects For Spectroscopic Composition...

Illumination Energy Management in Surface Inspection

Enhanced Inspection and Metrology Techniques And Systems Using Brig...

Film Thickness, Refractive Index, and Extinction Coefficient Determ...

Illumination Energy Management in Surface Inspection

SYSTEMS AND METHODS FOR INSPECTING A WAFER WITH INCREASED SENSITIVITY

Computer-Implemented Methods and Systems for Determining a Configur...

Systems and methods for inspecting a wafer with increased sensitivity

Systems and methods for inspecting an edge of a specimen