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Kurt J. Ahman
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San Jose, CA, US
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last 30 patents
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Patent Application
Contaminant reducing substrate transport and support system
Publication number
20050252454
Publication date
Nov 17, 2005
APPLIED MATERIALS, INC.
Vijay D. Parkhe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...